Chotest Superview W1, Highly Accurate and Easy-to-Use Optical 3D Surface Profile Measuring Instrument

• Customization: Available
• After-sales Service: Online Support/Service at Customer Site
• Application: Machinery, Electronics
• Model NO.: W1
• Certification: GS, CE, RoHS, ISO
• Condition: New
• Performance Classification: Economical
• Transport Package: Wooden Crates/Sea Packaging
• Specification: presently inquiring
• Trademark: CHOTEST
• Origin: China
• HS Code: 9031499090
• Production Capacity: 2000PCS/Year
• Package Size: 76.00cm * 122.00cm * 167.00cm
• Package Gross Weight: 600.000kg

Product Description

Company Profile

Product Description

CHOTEST SuperView W1, Highly accurate and easy-to-use optical 3D surface profile measuring instrument

Product introduction
White light interferometric micro- and nano-dimensional morphology measurements at the touch of a button
 

Our Advantages

Application Fields

It can be widely used in the measurement and analysis of surface roughness, geometric profile and other parameters of precision components in semiconductor, 3C electronics, ultra-precision machining, optical machining, micro and nano-materials, micro-electromechanical and other industries.

Semiconductor
Thin film, coated film, wafer IC
Roughness, microcontour

3C electronics
Sapphire screen, cell phone screen ink screen
Roughness, flatness step height

Optical
Precision molds, optical lenses
Roughness, flatness radius of curvature, profile

Micro and Nano Materials
PET substrate coating surface
Coating roughness film layer, thickness

Tribology
CSM Friction
Wear components
Roughness, contour size area/volume parameters
 

Measures and analyzes surface features such as flatness, roughness, corrugation, surface contour, surface defects, wear, corrosion, pore clearance, step height, bending deformation, and machining of various products, components, and material surfaces.

Unique 3D reconstruction algorithm automatically filters out sample surface noise, and the measurement accuracy can reach sub-nanometer level with the hardware system.

interference objective
Lenses with different magnifications, adapted to various surface types from ultra-smooth to rough.

Vacuum table
A customized vacuum table for semiconductor wafers ensures that the sample is not affected by weak air currents during the measurement process.

Dual-channel air-bearing vibration isolation system
Dual-channel air-bearing vibration isolation system with external air source and direct inflation of the pressurization device can effectively isolate the vibration noise transmitted from the ground.

Acoustic vibration isolation protection
The instrument shell and internal motion mechanism adopt separate design, which can effectively isolate the transmission of acoustic vibration.

Horizontal adjustment device
Tilt adjustment knob to adjust the stripe width and improve the reconstruction accuracy of 3D image.

Convenient Joystick
Ergonomically designed joystick with integrated automatic control of XYZ displacement and speed, light source brightness, and emergency stop button.

Xtreme Vision 3D Measurement and Analysis Software
All-in-one software, measurement and analysis in the same interface, pre-configured analysis parameters, the software automatically statistics measurement data to achieve rapid batch measurement function.
One-key analysis, multi-file analysis: Self-made analysis templates, can be one-key analysis of a single file, can also be one-key analysis of a batch of files.

Automatic multi-area measurement: Automatic displacement and focusing to complete the measurement and analysis of multiple areas of the surface.

Localized Measurement: Select any area feature in the field of view for measurement.

Splice Measurement: Determine the starting point and end point, automatically focus and find stripes to complete the large area splice measurement.

Pre-configured parameters: Pre-configure surface treatment, analysis tools and other parameters, one-click measurement, direct access to the results.

2D/3D view window, can extract the profile at any position, and can extract the profile at multiple positions at one time.

Current analysis window, used to display the curves and data of the current analysis tool, synchronized with the change of the profile position in the view window.

Real-time video window for comparing the finished scan with the 3D view.

Optical Specification Sheet

Objective Magnification	2.5x	5x	10x	20x	50x	100x
Numerical Aperture	0.075	0.13	0.3	0.4	0.55	0.7
Optical Resolution @550nm (μm)	3.7	2.1	0.92	0.69	0.5	0.4
Depth of Focus (μm)	48.6	16.2	3.04	1.71	0.9	0.56
Working Distance (mm)	10.3	9.3	7.4	4.7	3.4	2.0
Field of View H×V (mm)	0.5x for Imaging System 1024x1024: 3.84×3.84	0.5x for Imaging System 1024x1024: 1.92×1.92	0.5x for Imaging System 1024x1024: 0.96×0.96	0.5x for Imaging System 1024x1024: 0.48×0.48	0.5x for Imaging System 1024x1024: 0.192×0.192	0.5x for Imaging System 1024x1024: 0.096×0.096
	0.75x for Imaging System 1024x1024: 2.56×2.56	0.75x for Imaging System 1024x1024: 1.28×1.28	0.75x for Imaging System 1024x1024: 0.64×0.64	0.75x for Imaging System 1024x1024: 0.32×0.32	0.75x for Imaging System 1024x1024: 0.128×0.128	0.75x for Imaging System 1024x1024: 0.064×0.064
	1x for Imaging System 1024x1024: 1.92×1.92	1x for Imaging System 1024x1024: 0.96×0.96	1x for Imaging System 1024x1024: 0.48×0.48	1x for Imaging System 1024x1024: 0.24×0.24	1x for Imaging System 1024x1024: 0.096×0.096	1x for Imaging System 1024x1024: 0.048×0.048

 

Product Parameters

 

Model	W1	W1 - Pro	W1 - Ultra	WM100
Light Source	White Light LED	White Light LED	White Light LED	White Light LED
Imaging System	1024×1024	1024×1024	1024×1024	1024×1024
Interferometric Objective	Standard: 10×, Optional: 2.5×, 5×, 20×, 50×, 100×	Standard: 10×, Optional: 2.5×, 5×, 20×, 50×, 100×	Standard: 10×, Optional: 2.5×, 5×, 20×, 50×, 100×	Standard: 10×, Optional: 2.5×, 5×, 20×, 50×, 100×
Optical ZOOM	Standard: 0.5×, Optional: 0.375×, 0.75×, 1×	Standard: 0.5×, Optional: 0.375×, 0.75×, 1×	Standard: 0.5×, Optional: 0.375×, 0.75×, 1×	Standard: 0.5×, Optional: 0.375×, 0.75×
Standard Field of View	0.98×0.98mm (10× Objective, Optical ZOOM 0.5×)	0.98×0.98mm (10× Objective, Optical ZOOM 0.5×)	0.98×0.98mm (10× Objective, Optical ZOOM 0.5×)	0.98×0.98mm (10× Objective, Optical ZOOM 0.5×)
Turret	Standard: 3 - hole Manual, Optional: 5 - hole Electric	Standard: 3 - hole Manual, Optional: 5 - hole Electric	Standard: 3 - hole Manual, Optional: 5 - hole Electric	5 - hole Electric
Size	320×200mm	300×300mm	320×200mm	220×220mm
Movement Range	140×100mm	200×200mm	140×100mm	100×100mm
Load	10kg	10kg	10kg	10kg
Control Method	Electric	Electric	Electric	Electric
Horizontal Adjustment	±5°	±5°	±5°	±3°
Z - Axis Focus - Stroke	100mm	100mm	100mm	50mm
Control Method	Electric	Electric	Electric	Electric
Z - Direction Scanning Range	10mm	10mm	10mm	10mm
Shape Repeatability STR*1	0.1nm	0.1nm	0.1nm	0.1nm
Roughness RMS Repeatability*2	0.005nm	0.005nm	0.005nm	0.01nm
Step Measurement*3	Accuracy: 0.3%; Repeatability: 0.08%(1σ)	Accuracy: 0.3%; Repeatability: 0.08%(1σ)	Accuracy: 0.3%; Repeatability: 0.08%(1σ)	Accuracy: 0.5%; Repeatability: 0.1%(1σ)
Scanning Speed at 0.1nm Resolution	1.85μm/s	1.85μm/s	8μm/s	1.85μm/s
Weight of Main Instrument Unit	<160kg	<160kg	<160kg	50kg
Main Unit Dimensions (Length×Width×Height)	700×606×920mm	700×606×920mm	700×606×920mm	440×330×700mm
Working Temperature	15°C - 30°C, Temperature Gradient < 1°C/15 Minutes	15°C - 30°C, Temperature Gradient < 1°C/15 Minutes	15°C - 30°C, Temperature Gradient < 1°C/15 Minutes	15°C - 30°C, Temperature Gradient < 1°C/15 Minutes
Relative Humidity	5% - 95%RH, No Condensation	5% - 95%RH, No Condensation	5% - 95%RH, No Condensation	5% - 95%RH, No Condensation
Environmental Vibration	VC - C or Better	VC - C or Better	VC - C or Better	VC - C or Better
Software - Monitored Noise*4	3σ≤4nm	3σ≤4nm	3σ≤4nm	3σ≤4nm
Shock - Isolation Air Source	0.6Mpa Pressurized Clean Air Source, Oil - Free, Water - Free, 6mm Diameter Air Pipe (Air Source Optional)	0.6Mpa Pressurized Clean Air Source, Oil - Free, Water - Free, 6mm Diameter Air Pipe (Air Source Optional)	0.6Mpa Pressurized Clean Air Source, Oil - Free, Water - Free, 6mm Diameter Air Pipe (Air Source Optional)	0.6Mpa Pressurized Clean Air Source, Oil - Free, Water - Free, 6mm Diameter Air Pipe (Air Source Optional)
Power Supply	100 - 240VAC, 50/60Hz, 4A, Power 300W	100 - 240VAC, 50/60Hz, 4A, Power 300W	100 - 240VAC, 50/60Hz, 4A, Power 300W	100 - 240VAC, 50/60Hz, 4A, Power 300W
Others	No Strong Magnetic Field, No Corrosive Gas	No Strong Magnetic Field, No Corrosive Gas	No Strong Magnetic Field, No Corrosive Gas	No Strong Magnetic Field, No Corrosive Gas

 

*1 Measured with EPSI mode on a silicon wafer with Sa of 0.2nm under laboratory conditions, single - stripe, full - field 80μm filtering.

*2 Roughness performance parameters are obtained by measuring the RMS parameters of a silicon wafer with Sa of 0.2nm under laboratory conditions according to ISO 25178 international standard.

*3 Step height performance parameters are obtained by measuring a 4.7μm step height standard block under laboratory conditions according to ISO 10610:2009 standard.

*4 When the software - monitored noise 3σ≤4nm and 3σ≤10nm, the roughness RMS repeatability is adjusted to 0.015nm, the step height accuracy is adjusted to 0.7%, and the step height repeatability is adjusted to 0.12%; when the software - monitored noise 3σ>10nm, the equipment does not meet the usage requirements and needs to change the site.

Certifications

Packaging & Shipping