Measurement Range |
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X |
620mm |
720mm |
820mm |
920mm |
Y |
540mm |
640mm |
740mm |
840mm |
Z (Acceptable plate thickness) |
15mm |
15mm |
15mm |
15mm |
Optical Scanning Measurement Accuracy*1 |
±(3.0 + L/200)μm |
±(4.0 + L/200)μm |
±(4.0 + L/200)μm |
±(4.0 + L/200)μm |
Optical Scanning Minimum Measurable Aperture |
Φ0.35mm |
Φ0.35mm |
Φ0.35mm |
Φ0.35mm |
Area - Array Zoom Optical Measurement System*2 |
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Light - receiving lens |
Electric zoom lens (1 - 12.5 continuous zoom) |
Electric zoom lens (1 - 12.5 continuous zoom) |
Electric zoom lens (1 - 12.5 continuous zoom) |
Electric zoom lens (1 - 12.5 continuous zoom) |
Measurement accuracy*3 |
±(3.0 + L/200)μm |
±(3.0 + L/200)μm |
±(3.0 + L/200)μm |
±(3.0 + L/200)μm |
Single - field accuracy*3 |
±2.0μm |
±2.0μm |
±2.0μm |
±2.0μm |
Minimum measurable aperture |
Φ40μm |
Φ40μm |
Φ40μm |
Φ40μm |
Optical Measurement*4 |
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Z - axis (Without movement) - Height |
±2.0mm |
±2.0mm |
±2.0mm |
±2.0mm |
Z - axis (Without movement) - Accuracy |
±2μm |
±2μm |
±2μm |
±2μm |
Z - axis (With movement) - Height |
15mm |
15mm |
15mm |
15mm |
Z - axis (With movement) - Accuracy |
±(6 + L/100)μm |
±(6 + L/100)μm |
±(6 + L/100)μm |
±(6 + L/100)μm |
Maximum hole depth ratio (h/Φ) |
1.64 |
1.64 |
1.64 |
1.64 |
Probe spot diameter |
Φ100μm |
Φ100μm |
Φ100μm |
Φ100μm |
Maximum scanning speed |
200mm/s |
200mm/s |
200mm/s |
200mm/s |
Scanning width |
88mm |
88mm |
88mm |
88mm |
Maximum movement speed |
500mm/s |
500mm/s |
500mm/s |
500mm/s |
Dual - mode Image Acquisition System |
[1] High - resolution line - scan camera + high - resolution telecentric lens
[2] High - resolution area - array camera + electric zoom lens |
[1] High - resolution line - scan camera + high - resolution telecentric lens
[2] High - resolution area - array camera + electric zoom lens |
[1] High - resolution line - scan camera + high - resolution telecentric lens
[2] High - resolution area - array camera + electric zoom lens |
[1] High - resolution line - scan camera + high - resolution telecentric lens
[2] High - resolution area - array camera + electric zoom lens |
Glass cover plate |
Fully automatic lifting glass cover plate |
Fully automatic lifting glass cover plate |
Fully automatic lifting glass cover plate |
Fully automatic lifting glass cover plate |
Lighting System |
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Surface light |
RGB (Red, Green, Blue) LED programmable surface light + RGB (Red, Green, Blue) LED coaxial light |
RGB (Red, Green, Blue) LED programmable surface light + RGB (Red, Green, Blue) LED coaxial light |
RGB (Red, Green, Blue) LED programmable surface light + RGB (Red, Green, Blue) LED coaxial light |
RGB (Red, Green, Blue) LED programmable surface light + RGB (Red, Green, Blue) LED coaxial light |
Bottom light |
LED programmable strip light |
LED programmable strip light |
LED programmable strip light |
LED programmable strip light |
Measurement Items |
Measurement of basic geometric and form - position tolerances, such as: points, lines, circles (center coordinates, radius, diameter), arcs, centers, intersections, straightness, parallelism, angles, position degrees, line distances, line widths, holes, apertures, number of holes, distance between holes, distance from hole to edge, distance from arc center to hole, distance from arc center to edge, distance from arc high point to arc high point, distance from intersection to intersection, etc. |
Measurement of basic geometric and form - position tolerances, such as: points, lines, circles (center coordinates, radius, diameter), arcs, centers, intersections, straightness, parallelism, angles, position degrees, line distances, line widths, holes, apertures, number of holes, distance between holes, distance from hole to edge, distance from arc center to hole, distance from arc center to edge, distance from arc high point to arc high point, distance from intersection to intersection, etc. |
Measurement of basic geometric and form - position tolerances, such as: points, lines, circles (center coordinates, radius, diameter), arcs, centers, intersections, straightness, parallelism, angles, position degrees, line distances, line widths, holes, apertures, number of holes, distance between holes, distance from hole to edge, distance from arc center to hole, distance from arc center to edge, distance from arc high point to arc high point, distance from intersection to intersection, etc. |
Measurement of basic geometric and form - position tolerances, such as: points, lines, circles (center coordinates, radius, diameter), arcs, centers, intersections, straightness, parallelism, angles, position degrees, line distances, line widths, holes, apertures, number of holes, distance between holes, distance from hole to edge, distance from arc center to hole, distance from arc center to edge, distance from arc high point to arc high point, distance from intersection to intersection, etc. |
Software and System |
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Measurement software |
VisionXS Pro |
VisionXS Pro |
VisionXS Pro |
VisionXS Pro |
Document import format |
dxf, gerber |
dxf, gerber |
dxf, gerber |
dxf, gerber |
Document output format |
dxf, txt, csv, can be transmitted to the customer system as required |
dxf, txt, csv, can be transmitted to the customer system as required |
dxf, txt, csv, can be transmitted to the customer system as required |
dxf, txt, csv, can be transmitted to the customer system as required |
Operating system |
Win10 |
Win10 |
Win10 |
Win10 |
Air Source |
0.6MPa; 20L/min |
0.6MPa; 20L/min |
0.6MPa; 20L/min |
0.6MPa; 20L/min |
Working Power Supply |
(210 - 230) V, 50/60Hz, 3500W |
(210 - 230) V, 50/60Hz, 3500W |
(210 - 230) V, 50/60Hz, 3500W |
(210 - 230) V, 50/60Hz, 3500W |
Environment Temperature |
Temperature 20°C ± 1°C/hour, humidity 30 - 80% |
Temperature 20°C ± 1°C/hour, humidity 30 - 80% |
Temperature 20°C ± 1°C/hour, humidity 30 - 80% |
Temperature 20°C ± 1°C/hour, humidity 30 - 80% |
Environment Vibration |
Vibration <0.002g, below 10Hz |
Vibration <0.002g, below 10Hz |
Vibration <0.002g, below 10Hz |
Vibration <0.002g, below 10Hz |
Equipment Dimensions (mm) |
1825×1357×1865 |
1925×1457×1865 |
2025×1557×1865 |
2125×1657×1865 |
Weight |
2500kg |
2500kg |
2500kg |
2500kg |
Laser Displacement Sensor |
Customized according to actual needs |
Customized according to actual needs |
Customized according to actual needs |
Customized according to actual needs |