Image Sensor |
20 - megapixel CMOS |
20 - megapixel CMOS |
Display |
|
|
Body Display |
10.4 - inch LCD (XGA: 1024×768) |
10.4 - inch LCD (XGA: 1024×768) |
External Display |
Optional, 24 - inch LCD (XGA: 1920×1080) |
Optional, 24 - inch LCD (XGA: 1920×1080) |
Light - receiving Lens |
High - resolution double - telecentric lens |
High - resolution double - telecentric lens |
Lighting System |
|
|
Incident System |
Quad - segmentation lighting (white light), ring - shaped directional lighting (green) |
Quad - segmentation lighting (white light), ring - shaped directional lighting (green) |
Transmission System |
Telecentric transmitted lighting (green) |
Telecentric transmitted lighting (green) |
Coaxial Light (Optional) |
LED parallel light |
LED parallel light |
Measurement Field of View |
|
|
Wide - field (mm) |
200×200 (4 corners R50) |
300×200 (4 corners R50) |
High - precision (mm) |
130×130 |
230×130 |
Repeatability |
|
|
Wide - field |
|
|
Without stage movement |
±1μm |
±1μm |
With stage movement |
±2μm |
±2μm |
High - precision |
|
|
Without stage movement |
±0.5μm |
±0.5μm |
With stage movement |
±1.5μm |
±1.5μm |
Measurement Accuracy |
|
|
Without Stitching*1 |
|
|
Wide - field |
±3μm |
±3μm |
High - precision |
±1.5μm |
±1.5μm |
With Stitching*2 |
|
|
Wide - field |
±(5 + 0.02L)μm |
±(5 + 0.02L)μm |
High - precision |
±(3 + 0.02L)μm |
±(3 + 0.02L)μm |
Height Measurement (Optional) |
|
|
Measurable range (XY) |
Not supported |
120mm×110mm |
Maximum hole depth ratio (h/φ) |
Not supported |
1.64 |
Z - axis |
Not supported |
|
Without movement |
Not supported |
|
Height |
Not supported |
±2mm |
Accuracy |
Not supported |
±2μm |
With movement |
Not supported |
|
Height |
Not supported |
75mm |
Accuracy |
Not supported |
±(6 + L/100)μm |
Probe spot diameter |
Not supported |
Φ100μm (Φ18μm optional) |
Resolution |
Not supported |
0.25μm |
Horizontal Turntable Specifications (Optional) |
|
|
Rotation angle |
Resolution 0.02°, range 360° |
Resolution 0.02°, range 360° |
Rotation speed |
0.2 - 2 revolutions/second |
0.2 - 2 revolutions/second |
Maximum measurable diameter |
Φ60mm |
Φ60mm |
XY Electric Stage |
|
|
X - movement range |
110mm |
210mm |
Y - movement range |
110mm |
110mm |
Load capacity |
7.5kg |
7.5kg |
Z - axis movement range |
75mm |
75mm |
Measurement software |
VisionX |
VisionX |
Resolution |
0.1μm |
0.1μm |
Dimensions (L×W×H)mm |
531×386×731 |
531×503×731 |
Weight |
49kg |
75kg |
Working power supply |
100 - 240VAC, 50/60Hz, 2A, Power 300W |
100 - 240VAC, 50/60Hz, 2A, Power 300W |
Working environment |
Temperature 10°C - 35°C, humidity 20 - 80% (no condensation) |
Temperature 10°C - 35°C, humidity 20 - 80% (no condensation) |