Stroke Range - X |
100mm |
230mm |
300mm |
Stroke Range - Y |
100mm |
230mm |
300mm |
Stroke Range - Z |
100mm |
100mm |
100mm |
Overall Dimensions |
520×380×600mm |
720×580×1500mm |
1000×900×1500mm |
Instrument Weight |
50kg |
400kg |
500kg |
Measurement Principle |
Confocal Optical System |
Confocal Optical System |
Confocal Optical System |
Microscope |
10×, 20×, 50×, 100× |
10×, 20×, 50×, 100× |
10×, 20×, 50×, 100× |
Field of View |
120×120 μm~1.2×1.2 mm |
120×120 μm~1.2×1.2 mm |
120×120 μm~1.2×1.2 mm |
Height Measurement - Repeatability*1(1σ) |
12nm |
12nm |
12nm |
Height Measurement - Accuracy*1 |
±(0.2+L/100) μm |
±(0.2+L/100) μm |
±(0.2+L/100) μm |
Height Measurement - Display Resolution |
0.5nm |
0.5nm |
0.5nm |
Width Measurement - Repeatability*2(1σ) |
40nm |
40nm |
40nm |
Width Measurement - Accuracy*2 |
±2% |
±2% |
±2% |
Width Measurement - Display Resolution |
1nm |
1nm |
1nm |
XY Displacement Platform - Load |
10kg |
10kg |
10kg |
XY Displacement Platform - Control Method |
Electric |
Electric |
Electric |
Z0 Axis Scan Range |
10mm |
10mm |
10mm |
Turret |
5-hole Electric |
5-hole Electric |
5-hole Electric |
Light Source |
White Light LED |
White Light LED |
White Light LED |
Working Environment - Power |
100-240V AC, 50/60Hz, 2A, 300W |
100-240V AC, 50/60Hz, 2A, 300W |
100-240V AC, 50/60Hz, 2A, 300W |
Working Environment - Working Temperature |
15°C-30°C, Temperature Gradient <2°C/60 Minutes |
15°C-30°C, Temperature Gradient <2°C/60 Minutes |
15°C-30°C, Temperature Gradient <2°C/60 Minutes |
Working Environment - Relative Humidity |
5%-95%RH, No Condensation |
5%-95%RH, No Condensation |
5%-95%RH, No Condensation |
Working Environment - Environmental Vibration |
VC-C or Better |
VC-C or Better |
VC-C or Better |
Working Environment - Others |
No Strong Magnetic Field, No Corrosive Gas |
No Strong Magnetic Field, No Corrosive Gas |
No Strong Magnetic Field, No Corrosive Gas |