Chotest Vt6000 Series, Micro-Nano Scale Confocal Microscope

• Customization: Available
• After-sales Service: Online Support/Service at Customer Site
• Application: Machinery, Electronics
• Model NO.: VT6000
• Certification: GS, CE, RoHS, ISO
• Condition: New
• Performance Classification: Economical
• Transport Package: Wooden Crates/Sea Packaging
• Specification: presently inquiring
• Trademark: CHOTEST
• Origin: China
• HS Code: 9031499090
• Production Capacity: 2000PCS/Year
• Package Size: 76.00cm * 122.00cm * 167.00cm
• Package Gross Weight: 600.000kg

Product Description

Company Profile

Product Description

CHOTEST VT6000 Series, Micro-Nano Scale Confocal Microscope

Product introduction
VT6000 series confocal microscope is an inspection instrument used to measure the surface of various precision devices and materials at micro and nano level. It is an optical inspection instrument for non-contact scanning of device surfaces and creation of 3D images of the surfaces by combining the principle of confocal technology, precision Z scanning module and 3D modeling algorithms, etc. The system software processes and analyzes the 3D images of the device surfaces and obtains 2D and 3D parameters reflecting the quality of the device surfaces, thus realizing the 3D measurement of the device surface topography. It can measure all kinds of surfaces from smooth to rough, low reflectivity to high reflectivity, and the roughness, flatness, micro-geometric contour and curvature of the workpieces from nano-meter to micro-meter level, and it provides more than 300 kinds of 2D and 3D parameters according to the four major domestic and international standards of ISO/ASME/EUR/GBT as the evaluation standard.
 

Our Advantages

Detects samples at steep angles
No limitations on sample surface reflectance
One-click analysis of batch samples
Supports more than 300 2D and 3D parameter standards

Performance Characteristics
1,High precision and repeatability
1)Based on the rotary disk confocal optical system, combined with high stability structural design and excellent 3D reconstruction algorithms, the instrument is composed of a measurement system to ensure high measurement accuracy.
2) Unique vibration isolation design can reduce the vibration noise of the bottom surface, the instrument is stable and reliable in most environments, with good measurement repeatability.

2,Integrated operation of the measurement and analysis software
1) Measurement and analysis of the same interface operation, no need to switch, automatic statistics of measurement data, realizing the function of rapid batch measurement.
2) Visualization window, easy for users to observe the scanning process in real time.
3) combined with custom analysis templates of automated measurement functions, can automatically complete the measurement and analysis of multi-area process
4) Geometric analysis, roughness analysis, structural analysis, frequency analysis, functional analysis of the five functional modules complete
5) One-key analysis, multi-document analysis, free combination of analysis items saved as an analysis template, batch samples of one-key analysis, and provide data analysis and statistical charts.
6)Measure more than 300 kinds of 2D and 3D parameters according to ISO/ASME/EUR/GBT standards.

3,Precision manipulation handle
Integration of X, Y, Z three-direction displacement adjustment function of the joystick, can quickly complete the carrier platform translation, Z focus and other pre-measurement work.

4,Double anti-collision protection measures
In addition to the software ZSTOP set Z displacement lower limit for collision protection, another in the Z-axis is designed with mechanical and electronic sensors, when the lens touches the sample surface, the instrument automatically enters the emergency stop state, maximize the protection of the instrument, reduce the risk of human operation.

Application Areas

V-groove

Laser ablated grooves

Inverted Pyramid

Laser Hole

Patterned Wafers

Microlens Array

Tapered holes

Lens

Diamond Drill Bits

Conductive Ceramics

Paper Fiber

Ultra-precision metal tips

PCB substrates

Gold-plated microvias

Solar grid lines

Product Parameters

Instrument Model	VT6100	VT6200	VT6300
Stroke Range - X	100mm	230mm	300mm
Stroke Range - Y	100mm	230mm	300mm
Stroke Range - Z	100mm	100mm	100mm
Overall Dimensions	520×380×600mm	720×580×1500mm	1000×900×1500mm
Instrument Weight	50kg	400kg	500kg
Measurement Principle	Confocal Optical System	Confocal Optical System	Confocal Optical System
Microscope	10×, 20×, 50×, 100×	10×, 20×, 50×, 100×	10×, 20×, 50×, 100×
Field of View	120×120 μm~1.2×1.2 mm	120×120 μm~1.2×1.2 mm	120×120 μm~1.2×1.2 mm
Height Measurement - Repeatability*1(1σ)	12nm	12nm	12nm
Height Measurement - Accuracy*1	±(0.2+L/100) μm	±(0.2+L/100) μm	±(0.2+L/100) μm
Height Measurement - Display Resolution	0.5nm	0.5nm	0.5nm
Width Measurement - Repeatability*2(1σ)	40nm	40nm	40nm
Width Measurement - Accuracy*2	±2%	±2%	±2%
Width Measurement - Display Resolution	1nm	1nm	1nm
XY Displacement Platform - Load	10kg	10kg	10kg
XY Displacement Platform - Control Method	Electric	Electric	Electric
Z0 Axis Scan Range	10mm	10mm	10mm
Turret	5-hole Electric	5-hole Electric	5-hole Electric
Light Source	White Light LED	White Light LED	White Light LED
Working Environment - Power	100-240V AC, 50/60Hz, 2A, 300W	100-240V AC, 50/60Hz, 2A, 300W	100-240V AC, 50/60Hz, 2A, 300W
Working Environment - Working Temperature	15°C-30°C, Temperature Gradient <2°C/60 Minutes	15°C-30°C, Temperature Gradient <2°C/60 Minutes	15°C-30°C, Temperature Gradient <2°C/60 Minutes
Working Environment - Relative Humidity	5%-95%RH, No Condensation	5%-95%RH, No Condensation	5%-95%RH, No Condensation
Working Environment - Environmental Vibration	VC-C or Better	VC-C or Better	VC-C or Better
Working Environment - Others	No Strong Magnetic Field, No Corrosive Gas	No Strong Magnetic Field, No Corrosive Gas	No Strong Magnetic Field, No Corrosive Gas

 

*1 Measured with 50× objective on a 4.7μm standard step sample block in the laboratory environment.
*2 Measured with 50× objective on a standard reticle sample plate in the laboratory environment.

Certifications

Packaging & Shipping