Objective |
10× |
20× |
50× |
Image Sensor |
High - Definition Industrial Camera |
High - Definition Industrial Camera |
High - Definition Industrial Camera |
Display |
24 - inch LCD Display (XGA: 1920×1080) |
24 - inch LCD Display (XGA: 1920×1080) |
24 - inch LCD Display (XGA: 1920×1080) |
Objective Turret |
3 - hole manual (5 - hole electric optional) |
3 - hole manual (5 - hole electric optional) |
3 - hole manual (5 - hole electric optional) |
Single Field of View Range |
0.98×0.98mm |
0.49×0.49mm |
0.196×0.196mm |
Lateral Resolution*1 |
2μm |
1μm |
0.4μm |
Measurement Accuracy*2 - Single Field |
±0.3μm |
±0.2μm |
±0.1μm |
Measurement Accuracy*2 - Motion Axis Ex/Ey |
±(2.0 + 0.02L)μm |
±(2.0 + 0.02L)μm |
±(2.0 + 0.02L)μm |
Single Field Repeatability*3 |
±0.1μm |
±0.1μm |
±0.05μm |
Height Measurement*4 - Measurement Accuracy |
±(3.0 + L/100)μm |
±(3.0 + L/100)μm |
±(3.0 + L/100)μm |
Height Measurement*4 - Repeatability |
±1μm |
±1μm |
±1μm |
Stroke Range - X |
210mm |
210mm |
210mm |
Stroke Range - Y |
110mm |
110mm |
110mm |
Stroke Range - Z |
75mm |
75mm |
75mm |
Grating Display Resolution |
0.1μm |
0.1μm |
0.1μm |
Illumination System - Surface Light |
Coaxial Illumination |
Coaxial Illumination |
Coaxial Illumination |
Illumination System - Contour Light |
Telecentric Transmitted Illumination (Green) |
Telecentric Transmitted Illumination (Green) |
Telecentric Transmitted Illumination (Green) |
Point Laser Measurement Accuracy*5 - Max Depth - of - Field Ratio |
1.5 |
1.5 |
1.5 |
Point Laser Measurement Accuracy*5 - Height Range |
±3.5mm |
±3.5mm |
±3.5mm |
Point Laser Measurement Accuracy*5 - Accuracy |
±2.0μm |
±2.0μm |
±2.0μm |
Measurement Software |
VisionX |
VisionX |
VisionX |
Maximum Measurement Speed - XY |
80mm/s |
80mm/s |
80mm/s |
Maximum Measurement Speed - Z |
25mm/s |
25mm/s |
25mm/s |
External Dimensions (L×W×H) |
531×455×761mm |
531×455×761mm |
531×455×761mm |
Weight |
74kg |
74kg |
74kg |
Load Capacity |
5kg |
5kg |
5kg |
Working Power Supply |
200 - 240VAC, 50/60Hz, 2A, 300W |
200 - 240VAC, 50/60Hz, 2A, 300W |
200 - 240VAC, 50/60Hz, 2A, 300W |
Working Environment |
Temperature: 20°C ± 2°C, Humidity: 20 - 80%, Vibration: <0.002g, Below 15Hz |
Temperature: 20°C ± 2°C, Humidity: 20 - 80%, Vibration: <0.002g, Below 15Hz |
Temperature: 20°C ± 2°C, Humidity: 20 - 80%, Vibration: <0.002g, Below 15Hz |