| Instrument Dimensions |
(1000×900×1500)mm |
| Weight of Instrument Main Unit |
< 500 kg |
| Light Source |
White Light LED |
| Imaging System |
1024×1024 |
| Interferometric Objective |
10×, (2.5×, 5×, 20×, 50×, 100×) |
| Optical ZOOM |
0.5×, (0.75×, 1×, 0.375×) |
| Standard Field of View |
0.98×0.98mm |
| Turret |
5 - hole Electric |
| XY Displacement Platform - Size |
450×450mm |
| XY Displacement Platform - Movement Range |
300×300mm |
| XY Displacement Platform - Load |
10kg |
| XY Displacement Platform - Control Method |
Electric |
| XY Displacement Platform - Horizontal Adjustment |
±6°, Electric |
| Z - Axis Focus - Stroke |
100mm |
| Z - Axis Focus - Control Method |
Electric |
| Z - Direction Scanning Range |
10mm |
| Shape Repeatability |
0.1nm |
| Roughness RMS Repeatability |
0.005nm |
| Step Measurement - Accuracy |
0.3% |
| Step Measurement - Repeatability |
0.08% 1σ |
| Environmental Requirements |
|
| 1. Operating Environment |
No strong magnetic field, no corrosive gas |
| 2. Working Temperature |
15°C - 30°C, temperature gradient < 2°C/60 minutes |
| 3. Relative Humidity |
5% - 95%RH, no condensation |
| 4. Environmental Vibration |
VC - C or better |
| 5. Vibration - Isolation Air Source |
0.8Mpa pressurized clean air source, oil - free, water - free, air pipe diameter 6mm (optional) |
| 6. Power Supply Capacity |
330W |
| Other Requirements |
|
| 1. Light Source |
Should not remain at high brightness for a long time |
| 2. During Measurement |
Do not directly shake the instrument table by hand |
Audited Supplier 
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