Measurement Range |
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X |
620mm |
720mm |
820mm |
920mm |
Y |
540mm |
640mm |
740mm |
840mm |
Z (Acceptable plate thickness) |
15mm |
15mm |
15mm |
15mm |
Measurement System and Accuracy |
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Measurement accuracy*1 |
±(3.0 + L/200)μm |
±(4.0 + L/200)μm |
±(4.0 + L/200)μm |
±(4.0 + L/200)μm |
Minimum measurable aperture |
Φ0.35mm |
Φ0.35mm |
Φ0.35mm |
Φ0.35mm |
Height Measurement*2 |
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Z - axis |
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Without movement |
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Height |
±2.0mm |
±2.0mm |
±2.0mm |
±2.0mm |
Accuracy |
±2μm |
±2μm |
±2μm |
±2μm |
With movement |
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Height |
15mm |
15mm |
15mm |
15mm |
Accuracy |
±(6 + L/100)μm |
±(6 + L/100)μm |
±(6 + L/100)μm |
±(6 + L/100)μm |
Maximum hole depth ratio (h/Φ) |
1.64 |
1.64 |
1.64 |
1.64 |
Probe spot diameter |
Φ100μm |
Φ100μm |
Φ100μm |
Φ100μm |
Maximum scanning speed |
200mm/s |
200mm/s |
200mm/s |
200mm/s |
Scanning width |
88mm |
88mm |
88mm |
88mm |
Maximum movement speed |
500mm/s |
500mm/s |
500mm/s |
500mm/s |
Image acquisition system |
High - resolution line - scan camera + high - resolution telecentric lens |
High - resolution line - scan camera + high - resolution telecentric lens |
High - resolution line - scan camera + high - resolution telecentric lens |
High - resolution line - scan camera + high - resolution telecentric lens |
Glass cover plate |
Fully automatic lifting glass cover plate |
Fully automatic lifting glass cover plate |
Fully automatic lifting glass cover plate |
Fully automatic lifting glass cover plate |
Lighting System |
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Surface light |
RGB (Red, Green, Blue) LED programmable surface light + RGB (Red, Green, Blue) LED coaxial light |
RGB (Red, Green, Blue) LED programmable surface light + RGB (Red, Green, Blue) LED coaxial light |
RGB (Red, Green, Blue) LED programmable surface light + RGB (Red, Green, Blue) LED coaxial light |
RGB (Red, Green, Blue) LED programmable surface light + RGB (Red, Green, Blue) LED coaxial light |
Bottom light |
LED programmable strip light |
LED programmable strip light |
LED programmable strip light |
LED programmable strip light |
Measurement Items |
Basic geometric and form - position tolerances measurement, such as: points, lines, circles (center coordinates, radius, diameter), arcs, centers, intersections, straightness, parallelism, angles, position degrees, line distances, line widths, holes, apertures, number of holes, distance between holes, distance from hole to edge, distance from arc center to hole, distance from arc center to edge, distance from arc high point to arc high point, distance from intersection to intersection, etc. |
Basic geometric and form - position tolerances measurement, such as: points, lines, circles (center coordinates, radius, diameter), arcs, centers, intersections, straightness, parallelism, angles, position degrees, line distances, line widths, holes, apertures, number of holes, distance between holes, distance from hole to edge, distance from arc center to hole, distance from arc center to edge, distance from arc high point to arc high point, distance from intersection to intersection, etc. |
Basic geometric and form - position tolerances measurement, such as: points, lines, circles (center coordinates, radius, diameter), arcs, centers, intersections, straightness, parallelism, angles, position degrees, line distances, line widths, holes, apertures, number of holes, distance between holes, distance from hole to edge, distance from arc center to hole, distance from arc center to edge, distance from arc high point to arc high point, distance from intersection to intersection, etc. |
Basic geometric and form - position tolerances measurement, such as: points, lines, circles (center coordinates, radius, diameter), arcs, centers, intersections, straightness, parallelism, angles, position degrees, line distances, line widths, holes, apertures, number of holes, distance between holes, distance from hole to edge, distance from arc center to hole, distance from arc center to edge, distance from arc high point to arc high point, distance from intersection to intersection, etc. |
Software and System |
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Measurement software |
VisionXS Pro |
VisionXS Pro |
VisionXS Pro |
VisionXS Pro |
Document import format |
dxf, gerber |
dxf, gerber |
dxf, gerber |
dxf, gerber |
Document output format |
dxf, txt, csv, can be transmitted to the customer system as required |
dxf, txt, csv, can be transmitted to the customer system as required |
dxf, txt, csv, can be transmitted to the customer system as required |
dxf, txt, csv, can be transmitted to the customer system as required |
Operating system |
Win10 |
Win10 |
Win10 |
Win10 |
Air Source |
0.6MPa; 20L/min |
0.6MPa; 20L/min |
0.6MPa; 20L/min |
0.6MPa; 20L/min |
Working Power Supply |
(210 - 230) V, 50/60Hz, 3500W |
(210 - 230) V, 50/60Hz, 3500W |
(210 - 230) V, 50/60Hz, 3500W |
(210 - 230) V, 50/60Hz, 3500W |
Ambient Temperature |
Temperature 20°C ± 1°C/hour, humidity 30 - 80% |
Temperature 20°C ± 1°C/hour, humidity 30 - 80% |
Temperature 20°C ± 1°C/hour, humidity 30 - 80% |
Temperature 20°C ± 1°C/hour, humidity 30 - 80% |
Ambient Vibration |
Vibration <0.002g, below 10Hz |
Vibration <0.002g, below 10Hz |
Vibration <0.002g, below 10Hz |
Vibration <0.002g, below 10Hz |
Equipment Dimensions (mm) |
1825×1357×1865 |
1925×1457×1865 |
2025×1557×1865 |
2125×1657×1865 |
Weight |
2500kg |
2500kg |
2500kg |
2500kg |